Nitrogen dioxide (NO2) is a major air pollutant resulting in respiratory problems, from wheezing, coughing, to even asthma. Low-cost sensors based on WO3 nanoparticles are promising due to their distinct selectivity to detect NO2 at the ppb level. Here, we revealed that controlling the thickness of highly porous (97%) WO3 films between 0.5 and 12.3 μm altered the NO2 sensitivity by more than an order of magnitude. Therefore, films of WO3 nanoparticles (20 nm in diameter by N2 adsorption) with mixed γ- and ε-phase were deposited by single-step flame spray pyrolysis without affecting crystal size, phase composition, and film porosity. That way, sensitivity and selectivity effects were associated unambiguously to thickness, which was not possible yet with other sensor fabrication methods. At the optimum thickness (3.1 μm) and 125 °C, NO2 concentrations were detected down to 3 ppb at 50% relative humidity (RH), and outstanding NO2 selectivity to CO, methanol, ethanol, NH3 (all > 105), H2, CH4, acetone (all > 104), formaldehyde (>103), and H2S (835) was achieved. Such thickness-optimized and porous WO3 films have strong potential for integration into low-power devices for distributed NO2 air quality monitoring.
Keywords: chemiresistor; environmental sensing; flame aerosol technology; metal oxide; nanotechnology.