Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS

C Herzig; J Frank; A K Opitz; J Fleig; A Limbeck

doi:10.1016/j.talanta.2020.121012

Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS

Talanta. 2020 Sep 1:217:121012. doi: 10.1016/j.talanta.2020.121012. Epub 2020 Apr 18.

Authors

C Herzig¹, J Frank², A K Opitz¹, J Fleig¹, A Limbeck³

Affiliations

¹ TU Wien, Institute of Chemical Technologies and Analytics, Vienna, Austria.
² TU Wien, Joint Workshop, Technical Chemistry, Vienna, Austria.
³ TU Wien, Institute of Chemical Technologies and Analytics, Vienna, Austria. Electronic address: andreas.limbeck@tuwien.ac.at.

PMID: 32498899
DOI: 10.1016/j.talanta.2020.121012

Abstract

Online-laser ablation of solids in liquid (online-LASIL) coupled with ICP-MS detection was used as a new sampling strategy for the analysis of complex metal oxide (CMO) thin films. The in-house built and optimized online-LASIL ablation cell provides the unique possibility to correlate the signal intensities with the spatial origin of the signal at the sample. For that purpose a particle transport with as little particle dispersion as possible is crucial. To demonstrate the 2D imaging capability of this technique, geometrically structured samples with varying composition were prepared by pulsed laser deposition (PLD) and ion beam etching procedures. These thin films with a thickness of 220 nm were spatially resolved analysed. As a result, 2D intensity maps obtained by online-LASIL can be reported for the first time. Additionally a new approach for simultaneous online quantification was developed by adopting the standard addition concept allowing to correct for instrumental drifts of long time measurements.

Keywords: Geometrically structured thin films; Online-laser ablation of solids in liquid (online-LASIL); Online-quantification approach; Quantified 2D-mapping.