Chromatic confocal displacement sensing at oblique incidence angles

Appl Opt. 2020 Apr 1;59(10):3183-3186. doi: 10.1364/AO.388123.

Abstract

A commercial chromatic confocal displacement sensor, designed for probing a target at normal incidence, is adapted to probe reflective targets at an oblique incidence angle. The sensor is modified by positioning two low-cost optical elements-a collimating lens and a retro-reflector-in the reflection plane.