X-ray optics and beam characterization using random modulation: experiments

J Synchrotron Radiat. 2020 Mar 1;27(Pt 2):293-304. doi: 10.1107/S1600577520000508. Epub 2020 Feb 20.

Abstract

A parallel paper [Berujon, Cojocaru, Piault, Celestre, Roth, Barrett & Ziegler (2020), J. Synchrotron Rad. 27, 284-292] reviewed theoretically some of the available processing schemes for X-ray wavefront sensing based on random modulation. Shown here are experimental applications of the technique for characterizing both refractive and reflective optical components. These fast and accurate X-ray at-wavelength metrology methods can assist the manufacture of X-ray optics that transport X-ray beams with a minimum amount of wavefront distortion. It is also recalled how such methods can facilitate online optimization of active optics.

Keywords: at-wavelength metrology; metrology; near-field speckle-based phase-sensing; optics; speckle.