An in-line fiber optic Fabry-Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.
Keywords: Fabry–Perot; fiber optic sensor; high temperature; vibration measurement.