Indium Tin Oxide Thin-Film Thermocouple Probe Based on Sapphire Microrod

Sensors (Basel). 2020 Feb 27;20(5):1289. doi: 10.3390/s20051289.

Abstract

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

Keywords: indium tin oxide; sapphire cylinder; sputtering; thin-film thermocouple.