Surface structures in the micro- and nanometre length scale exert a major influence on performance and functionality for many specialized applications in surface engineering. However, they are often limited to certain pattern scales and materials, depending on which processing technique is used. Likewise, the morphology of the topography is in complex relation to the utilized processing methodology. In this study, the generation of hierarchical surface structures in the micro- as well as the sub-micrometre scale was achieved on ceramic, polymer and metallic materials by utilizing Ultrashort Pulsed Direct Laser Interference Patterning (USP-DLIP). The morphologies of the generated patterns where examined in relation to the unique physical interaction of each material with ultrashort pulsed laser irradiation. In this context, the pattern formation on copper, CuZn37 brass and AISI 304 stainless steel was investigated in detail by means of a combination of experiment and simulation to understand the individual thermal interactions involved in USP-DLIP processing. Thereby, the pattern's hierarchical topography could be tailored besides achieving higher process control in the production of patterns in the sub-µm range by USP-DLIP.