A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

Jia Qi; Wenbo Li; Wei Chu; Jianping Yu; Miao Wu; Youting Liang; Difeng Yin; Peng Wang; Zhenhua Wang; Min Wang; Ya Cheng

doi:10.3390/mi11020213

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

Micromachines (Basel). 2020 Feb 19;11(2):213. doi: 10.3390/mi11020213.

Authors

Jia Qi^{1

2}, Wenbo Li^{1

2

3}, Wei Chu⁴, Jianping Yu^{1

2

5}, Miao Wu⁴, Youting Liang⁴, Difeng Yin^{1

2}, Peng Wang^{1

2

5}, Zhenhua Wang⁴, Min Wang⁴, Ya Cheng^{1

4

6

7}

Affiliations

¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
² University of Chinese Academy of Sciences, Beijing 100049, China.
³ School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China.
⁴ XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
⁵ School of Physics Science and Engineering, Tongji University, Shanghai 200092, China.
⁶ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
⁷ Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China.

Abstract

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker's transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm², enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

Keywords: glass bonding; microfluidic; ultrafast laser microfabrication.

Grants and funding

18DZ1112700/Science and Technology Commission of Shanghai Municipality