Study on a High Performance MEMS Infrared Thermopile Detector

Aida Bao; Cheng Lei; Haiyang Mao; Ruirui Li; Yihao Guan

doi:10.3390/mi10120877

Study on a High Performance MEMS Infrared Thermopile Detector

Micromachines (Basel). 2019 Dec 13;10(12):877. doi: 10.3390/mi10120877.

Authors

Aida Bao^{1

2}, Cheng Lei², Haiyang Mao³, Ruirui Li^{1

3}, Yihao Guan²

Affiliations

¹ School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China.
² School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
³ Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.

Abstract

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.

Keywords: MEMS; etch-stop; infrared detector; thermopile.