The piezoelectric actuator (PA) is one of the most commonly used actuators in a micro-positioning stage. But its hysteresis non-linearity can cause error in the piezo-actuated stage. A modified Bouc-Wen model is presented in this paper to describe the hysteresis non-linearity of the piezo-actuated stage. This model can be divided into two categories according to the input frequency: rate-independent type and rate-dependent type. A particle swarm optimization method (PSO) is employed to identify these parameters of the Bouc-Wen hysteresis model. An inverse model feedforward compensator is established based on the modified Bouc-Wen model. The fuzzy proportional-integral-derivative (PID) controller combined with the feedforward compensator is implemented to the piezo-actuated stage. The experimental results indicate that the proposed control strategy can compensate for the hysteresis phenomenon.
Keywords: Bouc-Wen hysteresis model; feedforward compensator; piezo-actuated stage.