Independent driving method for significant hysteresis reduction of piezoelectric stack actuators

Rev Sci Instrum. 2019 Nov 1;90(11):115006. doi: 10.1063/1.5116634.

Abstract

Piezoelectric actuators are used extensively in precision positioning platforms. However, the positioning accuracy is severely affected by the hysteresis characteristics of piezoelectric ceramics. Piezoelectric stack actuators (PSAs) are usually composed of hundreds of thin piezoelectric ceramic layers connected in parallel, and their hysteresis quantity is the accumulation of that in each layer, which results in large nonlinear deformation. A new driving method is proposed for PSAs to drive each layer independently, and all the layers are driven in sequence. The independent driving logic is analyzed, and the scheme of the driving circuit is presented to replace the traditional voltage amplifier, which guarantees that there is no need to change the original driving signal. Experimental results show that the hysteresis of a homemade seven-layer PSA is reduced from approximately 12.5% to 2.7% compared with the traditional parallel driving method in various frequencies. The proposed independent driving method can reduce hysteresis significantly and achieve good linearity in an open-loop control, which does not need high-performance sensors or hysteresis models.