Flexible and Highly Sensitive Strain Sensor Based on Laser-Induced Graphene Pattern Fabricated by 355 nm Pulsed Laser

Sung-Yeob Jeong; Yong-Won Ma; Jun-Uk Lee; Gyeong-Ju Je; Bo-Sung Shin

doi:10.3390/s19224867

Flexible and Highly Sensitive Strain Sensor Based on Laser-Induced Graphene Pattern Fabricated by 355 nm Pulsed Laser

Sensors (Basel). 2019 Nov 8;19(22):4867. doi: 10.3390/s19224867.

Authors

Sung-Yeob Jeong¹, Yong-Won Ma¹, Jun-Uk Lee², Gyeong-Ju Je², Bo-Sung Shin²

Affiliations

¹ Interdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Pusan 46241, Korea.
² Department of Optics and Mechatronics Engineering, Pusan National University, Pusan 46241, Korea.

Abstract

A laser-induced-graphene (LIG) pattern fabricated using a 355 nm pulsed laser was applied to a strain sensor. Structural analysis and functional evaluation of the LIG strain sensor were performed by Raman spectroscopy, scanning electron microscopy (SEM) imaging, and electrical-mechanical coupled testing. The electrical characteristics of the sensor with respect to laser fluence and focal length were evaluated. The sensor responded sensitively to small deformations, had a high gauge factor of ~160, and underwent mechanical fracture at 30% tensile strain. In addition, we have applied the LIG sensor, which has high sensitivity, a simple manufacturing process, and good durability, to human finger motion monitoring.

Keywords: 355 nm pulsed laser; laser-induced graphene (LIG); polydimethylsiloxane (PDMS); polyimide; strain sensor.