Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

Opt Express. 2019 Sep 30;27(20):28364-28382. doi: 10.1364/OE.27.028364.

Abstract

With single-point diamond turning (SPDT), a series of samples are processed under different cutting parameters. The brittle-ductile transition depth of ZnSe crystal is obtained, and the damages of the samples are measured from surface and subsurface damage depths as well as damage density. The effects of cutting parameters on the damages are investigated quantitatively. The results show the cutting depth has a minor while the feed has a major effects on the damages. Also, the interaction effect between feed and cutting depth is very small for surface damage depth or damage density, while it is large for subsurface damage depth. Based on the indentation mechanics and the kinetic characteristics of SPDT, a model is proposed to evaluate the surface and subsurface damage depths of ZnSe crystal by cutting parameters. The model has an average relative error less than 15.0%, which could be further used to obtain the depth and the removal characteristics of cracks in shoulder region.