In this paper, an integrated processing method was demonstrated to fabricate the polymer-based thermo-optic (TO) switch with low power consumption. The characteristic parameters of the switch were carefully designed and simulated. The air trench structure was exploited to reduce the power consumption, which can be formed with the waveguide simultaneously by the integrated processing method. Moreover, the introduced polymer/silica hybrid waveguide structure can also improve the response time of the device. A typical fabricated switch presented a low switching power of 5.2 mW. The measured switching rise time and fall time are 192.2 and 201.1 μs, respectively.