We present experimental and theoretical studies of a metamaterial-based plasmonic structure to build a plasmonic-molecular coupling detection system. High molecular sensitivity is realized only when molecules are located in the vicinity of the enhanced field (hot spot region); thus, introducing target molecules in the hot spot region to maximize plasmonic-molecular coupling is crucial to developing the sensing technology. We design a metamaterial consisting of a vertically oriented metal insulator metal (MIM) structure with a 25 nm channel sandwiched between two metal films, which enables the delivery of molecules into the large ravinelike hot spot region, offering an ultrasensitive platform for molecular sensing. This metamaterial is applied to carbon dioxide and butane detection. We design the structure to exhibit resonances at 4033 and 2945 cm-1, which overlap with the C═O and -CH2 vibration modes, respectively. The mutual coupling of these two resonance modes creates a Fano resonance, and their distinct peaks are clearly observed in the corresponding transmission dips. In addition, owing to its small footprint, such a vertical-oriented MIM structure enables us to increase the integration density and allows the detection of a 20 ppm concentration with negligible background noise and high selectivity in the mid-infrared region.
Keywords: Fano resonance; enormous hot spot region; gas sensor; high-aspect-ratio structure; metal insulator metal (MIM) structure.