High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

Jintian Lin; Junxia Zhou; Rongbo Wu; Min Wang; Zhiwei Fang; Wei Chu; Jianhao Zhang; Lingling Qiao; Ya Cheng

doi:10.3390/mi10090612

High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

Micromachines (Basel). 2019 Sep 15;10(9):612. doi: 10.3390/mi10090612.

Authors

Jintian Lin¹, Junxia Zhou^{2

3}, Rongbo Wu^{4

5}, Min Wang^{6

7}, Zhiwei Fang^{8

9}, Wei Chu¹⁰, Jianhao Zhang^{11

12}, Lingling Qiao¹³, Ya Cheng^{14

15

16

17

18}

Affiliations

¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. jintianlin@siom.ac.cn.
² State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. 5218092020026@stu.ecnu.edu.cn.
³ XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China. 5218092020026@stu.ecnu.edu.cn.
⁴ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. rbwu@siom.ac.cn.
⁵ School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. rbwu@siom.ac.cn.
⁶ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. mwang@phy.ecnu.edu.cn.
⁷ XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China. mwang@phy.ecnu.edu.cn.
⁸ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. zwfang@phy.ecnu.edu.cn.
⁹ XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China. zwfang@phy.ecnu.edu.cn.
¹⁰ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. chuwei@siom.ac.cn.
¹¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. jhzhang@siom.ac.cn.
¹² School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. jhzhang@siom.ac.cn.
¹³ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. qiaolingling@siom.ac.cn.
¹⁴ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ya.cheng@siom.ac.cn.
¹⁵ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. ya.cheng@siom.ac.cn.
¹⁶ XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China. ya.cheng@siom.ac.cn.
¹⁷ School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. ya.cheng@siom.ac.cn.
¹⁸ Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, Shanxi, China. ya.cheng@siom.ac.cn.

Abstract

We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

Keywords: chemomechanical polish; lithium niobate; optical lithography; photonic integrated circuit; waveguide.

Grants and funding

11734009/National Natural Science Foundation of China