Electron backscatter diffraction (EBSD) device can provide crystal structure, orientation, and phase content data through analysis of EBSD patterns. The reliability and precision of these data depend on the quality of the band position and zone axes data. This study introduces a new image processing method that can accurately provide the location of Kikuchi bands and poles. In this method, pattern rotation and gray gradient calculation are employed after for the initial detection of Kikuchi lines. Hough transform and Gaussian function are used for the final definition of bands position. Based on the position of Kikuchi bands, the indices of lattice planes and zone axes can be obtained precisely and easily. Angles between zone axes are calculated using locating results. The maximum error for a single-crystal silicon sample is only 8.07%, illustrating the accuracy of this new method.
Keywords: Kikuchi bands; edge detection; electron backscatter diffraction; image processing.
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