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2 Laboratory of Sensors and Microsystems, Yuri Gagarin State Technical University of Saratov, 77 Polytechnicheskaya str., 410054 Saratov, Russia. vsysoev@sstu.ru.
3 National University of Science and Technology MISiS, 4 Leninskiy pr., 119991 Moscow, Russia. vsysoev@sstu.ru.
4 Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
5 Science and Technology of Nanosystems, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
6 Faculty of Engineering, Kyrgyz-Turkish Manas University, Mira Avenue 56, 720044 Bishkek, Kyrgyz Republic.