This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm2, making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of 12.56 μ V / dps , 17.13 μ V / dps and 25.79 μ V / dps in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than 0.2 % for roll and pitch mode and 0.001 % for the yaw mode, in the full-scale range of ± 1500 deg / s . The multi-axis gyroscope demonstrates an angle random walk of 2.79 dps / Hz , 2.14 dps / Hz , and 1.42 dps / Hz , for the roll, pitch and yaw rate with the in-run bias stability 1.62 deg / s , 1.14 deg / s and 0.84 deg / s respectively.
Keywords: MEMS; dynamic range; inertial sensor; multi-axis gyroscope; single drive; wide bandwidth.