Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Jaume Verd; Jaume Segura

doi:10.3390/mi10040273

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Micromachines (Basel). 2019 Apr 24;10(4):273. doi: 10.3390/mi10040273.

Authors

Jaume Verd¹, Jaume Segura²

Affiliations

¹ Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain. jaume.verd@uib.eu.
² Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain. jaume.segura@uib.es.

Abstract

Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...].

Publication types

Editorial