Microfluidics, one of the most attractive and fastest developed areas of modern science and technology, has found a number of applications in medicine, biology and chemistry. To address advanced designing challenges of the microfluidic devices, the research is mainly focused on development of efficient, low-cost and rapid fabrication technology with the wide range of applications. For the first time, this paper presents fabrication of microfluidic chips using hybrid fabrication technology-a grouping of the PVC (polyvinyl chloride) foils and the LTCC (Low Temperature Co-fired Ceramics) Ceram Tape using a combination of a cost-effective xurography technique and a laser micromachining process. Optical and dielectric properties were determined for the fabricated microfluidic chips. A mechanical characterization of the Ceram Tape, as a middle layer in its non-baked condition, has been performed and Young's modulus and hardness were determined. The obtained results confirm a good potential of the proposed technology for rapid fabrication of low-cost microfluidic chips with high reliability and reproducibility. The conducted microfluidic tests demonstrated that presented microfluidic chips can resist 3000 times higher flow rates than the chips manufactured using standard xurography technique.
Keywords: Ceram Tape; PVC foil; hybrid fabrication; microfluidic chip; xurography.