Inkjet printing techniques for the etching of polymers and their application to the fabrication of organic electronic devices are reviewed. A mechanism is proposed for the formation of via holes in polymer layers through inkjet printing with solvent, and recent achievements in the fabrication with inkjet etching of various three-dimensional microstructures (i.e., microwells, microgrooves, hexagonal holes, and concave structures) are discussed. In addition, organic electronic devices are presented that use inkjet-etched subtractive patterns as platforms for the selective depositions of an emissive material, a liquid crystal, an organic conductor, an organic insulator, and an organic semiconductor, and as an optical waveguide.
Keywords: etching; inkjet; organic electronic device; organic semiconductor; organic transistor.