As an important research topic of surface enhanced Raman scattering (SERS), periodic metal nanoarrays have attracted remarkable attention due to their superior properties, such as excellent enhancing ability, and high structural homogeneity and stability. In this work, periodic Au nanostructures with variable repetitive unit size, Au nanoparticle size, and gap sizes are fabricated by electron beam lithography on SiO₂/Si substrates to investigate the influence of these structural parameters on SERS performances. The SERS intensity is found to increase linearly with decreasing repetitive unit size (increase of Au nanoparticle number density), while shows no obvious dependence on the Au nanoparticle size. A SERS enhancement factor of 6.6 × 105 is obtained for Au arrays with a repetitive unit size of 200 nm. The gap size does not affect the SERS intensity when it is over 75 nm, and exhibits an obvious enhancement effect when it is below 25 nm. A linear quantitative relationship between the Raman intensity and analyte concentrations of R6G, as well as a limit of detection of 10-11 mol/L was achieved for an Au nanoparticle array with gap size of 25 nm.