Micro-Hall Sensors Based on Two-Dimensional Molybdenum Diselenide

J Nanosci Nanotechnol. 2019 Jul 1;19(7):4330-4332. doi: 10.1166/jnn.2019.16266.

Abstract

Sensors and electronic devices based on semiconductors in their two-dimensional forms have many advantages. In this paper, we studied micro-Hall sensors based on two-dimensional molybdenum diselenide for the first time. The micro-Hall sensor based on a Ti/MoSe₂/Ti structure clearly showed a linear dependence of the Hall voltage as a function of the magnetic field, with a magnetic sensitivity of ∼16 V/AT. The magnetic sensitivity was higher in the Au/MoSe₂/Au structure, with a maximum value of ∼120 V/AT at a bias current of 100 mA; the minimum detectable magnetic field was found to be 1.45 μT/Hz1/2 at the same current value, making our new micro-Hall sensor a very good candidate for magnetic sensing applications.