Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor

Libo Zhao; Linya Huang; Yingjie Hu; Weile Jiang; Dejiang Lu; Zhikang Li; Xiangyang Zhou; Jiuhong Wang

doi:10.1063/1.5046879

Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor

Rev Sci Instrum. 2018 Dec;89(12):125001. doi: 10.1063/1.5046879.

Authors

Libo Zhao¹, Linya Huang¹, Yingjie Hu¹, Weile Jiang², Dejiang Lu¹, Zhikang Li¹, Xiangyang Zhou³, Jiuhong Wang¹

Affiliations

¹ State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.
² Institute of Heritage Sites and Historical Architecture Conservation, Xi'an Jiaotong University, Xi'an 710049, China.
³ School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China.

PMID: 30599598
DOI: 10.1063/1.5046879

Abstract

In order to improve the measuring accuracy of micro-electromechanical system (MEMS) resonant sensor with micro-cantilever structure to measure fluid density, a temperature compensation method is presented. The elastic modulus of the micro-cantilever is calculated considering its temperature coefficient so that the working equation to measure fluid density is obtained with decreasing temperature disturbance on the measuring accuracy. The simulations and experimental measurements of several fluids with different densities were carried out by the MEMS micro-cantilever resonant sensor under different temperatures. The simulation analyses showed that the fluid densities measured by using the proposed resonant density sensor with temperature compensation were more fitted with the reference density values than those without temperature compensation. The experimental results showed that both the measuring accuracy and stability of the MEMS micro-cantilever resonant sensor in fluid density measurement were increased more than twice based on the temperature compensation method. Therefore, the proposed temperature compensation method is important to improve the measuring precision and stability of the MEMS micro-cantilever resonant sensor in fluid density detection fields.