Editorial for the Special Issue on Piezoelectric MEMS

Micromachines (Basel). 2018 May 15;9(5):237. doi: 10.3390/mi9050237.

Abstract

Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...].

Publication types

  • Editorial