A variety of strain sensors have been developed to measure internal deformations of elastomeric structures. Strain sensors measuring extremely small mechanical strain, however, have not yet been reported due mainly to the inherently intrusive integration of the sensor with the test structure. In this work, we report the development of a minimally intrusive, highly sensitive mechanical strain transducer realized by monolithically embedding a Fabry-Pérot (FP) etalon into a poly(dimethylsiloxane) (PDMS) block test structure. Due to the extreme sensitivity of the FP resonance condition to the thickness of the spacer layer between the two reflectors, the limit of detection in the mechanical deformation can be as low as ~110 nm with a 632.8 nm laser used as the probing light. The compatibility of PDMS with additive fabrication turned out to be the most crucial enabling factor in the realization of the FP etalon-based strain transducer.
Keywords: PDMS; etalon; minimally intrusive; soft MEMS; strain sensing.