The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing

Qian Su; Jie Xu; Chenxi Wang; Debin Shan; Bin Guo

doi:10.3390/mi9020055

The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing

Micromachines (Basel). 2018 Jan 31;9(2):55. doi: 10.3390/mi9020055.

Authors

Qian Su^{1

2}, Jie Xu^{3

4}, Chenxi Wang^{5

6}, Debin Shan^{7

8}, Bin Guo^{9

10}

Affiliations

¹ Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China. susan8401@163.com.
² School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China. susan8401@163.com.
³ Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China. xjhit@hit.edu.cn.
⁴ School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China. xjhit@hit.edu.cn.
⁵ Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China. beyondchenxi@163.com.
⁶ School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China. beyondchenxi@163.com.
⁷ Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China. shandebin@hit.edu.cn.
⁸ School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China. shandebin@hit.edu.cn.
⁹ Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China. guobin@hit.edu.cn.
¹⁰ School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China. guobin@hit.edu.cn.

Abstract

The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components.

Keywords: Mg-Li alloy; micro-array channels; micro-embossing; ultrafine grains.