Cantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with zinc oxide (ZnO) nanorods or nanotubes having a diameter of approximately 100 nm and a length of 1 µm. The nanostructure growth was first optimized on a silicon wafer and then transferred to the cantilevers. The ZnO nanorods were grown in an autoclave. The centre of the nanorods was dissolved in order to obtain nanotubes. The dissolution conditions were optimized in order to have the longest etching depth. After 1.25 h in a dissolution solution containing 0.75 wt% of NH3(aq) and 0.75 wt% of cetyltrimethyl ammonium bromide, the longest etching depth was obtained. After the transfer of the syntheses to the cantilevers, nanorods/nanotubes grew on both sides of the cantilever, which prevents the reflection of the laser allowing the resonance frequency measurement. A masking procedure was developed in order to avoid the growth on one face of the cantilever of zinc oxide nanostructures. As far as the authors are concerned, for the first time, zinc oxide nanotubes were synthesized on only one face of cantilevers with optical readout.
Keywords: ZnO nanorods; ZnO nanotubes; nanostructured microcantilevers; sensor; synthesis improvement.