Thin and flexible sensor foils are very suitable for unobtrusive integration with mechanical structures and allow monitoring for example strain and temperature while minimally interfering with the operation of those structures. Electrical strain gages have long been used for this purpose, but optical strain sensors based on Bragg gratings are gaining importance because of their improved accuracy, insusceptibility to electromagnetic interference, and multiplexing capability, thereby drastically reducing the amount of interconnection cables required. This paper reports on thin polymer sensor foils that can be used as photonic strain gage or temperature sensors, using several Bragg grating sensors multiplexed in a single polymer waveguide. Compared to commercially available optical fibers with Bragg grating sensors, our planar approach allows fabricating multiple, closely spaced sensors in well-defined directions in the same plane realizing photonic strain gage rosettes. While most of the reported Bragg grating sensors operate around a wavelength of 1550 nm, the sensors in the current paper operate around a wavelength of 850 nm, where the material losses are the lowest. This was accomplished by imprinting gratings with pitches 280 nm, 285 nm, and 290 nm at the core-cladding interface of an imprinted single mode waveguide with cross-sectional dimensions 3 × 3 µm². We show that it is possible to realize high-quality imprinted single mode waveguides, with gratings, having only a very thin residual layer which is important to limit bend losses or cross-talk with neighboring waveguides. The strain and temperature sensitivity of the Bragg grating sensors was found to be 0.85 pm/µε and -150 pm/°C, respectively. These values correspond well with those of previously reported sensors based on the same materials but operating around 1550 nm, taking into account that sensitivity scales with the wavelength.
Keywords: Bragg grating sensor; Ormocer; flexible sensor; foil; nanoimprint lithography; polymer; strain gage rosette; strain sensor; temperature sensor; waveguide.