The precursor solution is sent to the ultrasonic nozzle directly through a needle tube to prepare Zn1-xCrxO (x=0, 0.01, 0.03 and 0.05)films on quartz substratesby ultrasonic spray method. The structures, optical and magnetic properties of the films were measured by X-ray diffracmeter(XRD), scanning electron microscope(SEM), fluorescence spectrometer, ultraviolet-visible light detector, vibrating sample magnetometer (VSM) and so on. The experimental results indicate that, the undopedZnO thin films exhibit the hexagonal wurtzite crystalline structure with a preferential orientation of (002); the Cr doping restrains the preferred orientation of C axis; the average grain sizes of the samples increase withCr doping, and thesize attains the maximum(31.4 nm) when x=3%. The SEMimages show that the Zn1-xCrxO (x=0, 0.01, 0.03 and 0.05) films are grain-like particles. And it exhibits a long strip shape when x=5%. Moreover, the doping of Cr makes the photoluminescence (PL) spectra of Zn1-xCrxO films change evidently. The undoped sample shows an ultraviolet emission peak at 378 nm as well as a defect related green peak at around 550 nm. However, for the doping samples, there is only a wide range of emission peak from 350 to 550 nm. By gaussian fitting，it is found that VZn, Zni and V-Zn defects exist in the Cr doping films, and VZn is largest when x=3%. The band gap increases with the doping of Cr, and reaches the maximum when x=3%. The doping of Cr hasthe band gap of the samples increase, and the band gapreachs themaximum(3.37 eV) when x=3%. Magnetic measured results show that threedoping samples Zn1-xCrxO(x=1%, 3% and 5%) are ferromagnetic at room temperature, and the magnetization of Zn1-xCrxO (x=3%) is the largest, which is corresponding to the most VZn defect. The experimental results also prove the the oretical prediction that the substitutive Cr in the oxidation state of +3 and the neutral Zn vacancy in the ZnO∶Cr sample are the most favorable defect complex to maintain a high stability of ferromagnetic order.