Chemistry for electron-induced nanofabrication

Beilstein J Nanotechnol. 2018 Apr 30:9:1317-1320. doi: 10.3762/bjnano.9.124. eCollection 2018.

Authors

Petra Swiderek¹, Hubertus Marbach², Cornelis W Hagen³

Affiliations

¹ University of Bremen, Faculty 2 (Chemistry/Biology), Institute of Applied and Physical Chemistry, Leobener Straße 5, 28334 Bremen, Germany.
² Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany.
³ Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands.

No abstract available

Keywords: FEBIP; electron-induced chemistry, FEBID; nanofabrication; nanolithography.

Publication types

Editorial