Formation of yttria-stabilized zirconia nanotubes by atomic layer deposition toward efficient solid electrolytes

Eunsoo Kim; Hyunchul Kim; Changdeuck Bae; Daehee Lee; Jooho Moon; Joosun Kim; Hyunjung Shin

doi:10.1186/s40580-017-0127-9

Formation of yttria-stabilized zirconia nanotubes by atomic layer deposition toward efficient solid electrolytes

Nano Converg. 2017;4(1):31. doi: 10.1186/s40580-017-0127-9. Epub 2017 Dec 5.

Authors

Eunsoo Kim¹, Hyunchul Kim¹, Changdeuck Bae^{1

2}, Daehee Lee³, Jooho Moon³, Joosun Kim⁴, Hyunjung Shin¹

Affiliations

¹ Department of Energy Science, Sungkyunkwan University, Suwon, 440-746 South Korea.
² Integrated Energy Center for Fostering Global Creative Researcher (BK 21 plus), Sungkyunkwan University, Suwon, 440-746 South Korea.
³ Department of Materials Science and Engineering, Yonsei University, Seoul, 120-749 South Korea.
⁴ High-Temperature Energy Materials Research Center, Korea Institute of Science and Technology, Seoul, 136-791 South Korea.

Abstract

We describe a fabrication strategy for preparing yttria-stabilized zirconia nanotube (YSZ-NT) arrays embedded in porous alumina membranes by means of template-directed atomic layer deposition (ALD) technique. The individual YSZ-NTs have a high aspect-ratio of well over 120, about ~ 110 nm in diameter, and ~ 14 µm in length. Interfacing the tube arrays with porous Pt was also introduced on the basis of partial etching technique in order to construct Pt/YSZ-NTs/Pt membrane electrode assembly (MEA) structures. The resulting YSZ-NTs MEAs show a 7 mm in diameter with a roughness factor of ~ 2. Area specific resistance was measured up to 1.84 Ω cm² at 400 °C using H₂ as fuel.

Keywords: Atomic layer deposition; Solid oxide electrolytes; YSZ nanotubes.