Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

Junbiao Peng; Jinglin Wei; Zhennan Zhu; Honglong Ning; Wei Cai; Kuankuan Lu; Rihui Yao; Hong Tao; Yanqiong Zheng; Xubing Lu

doi:10.3390/nano7120419

Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

Nanomaterials (Basel). 2017 Nov 29;7(12):419. doi: 10.3390/nano7120419.

Authors

Junbiao Peng^{1

2}, Jinglin Wei^{3

4}, Zhennan Zhu⁵, Honglong Ning⁶, Wei Cai⁷, Kuankuan Lu⁸, Rihui Yao⁹, Hong Tao¹⁰, Yanqiong Zheng¹¹, Xubing Lu¹²

Affiliations

¹ School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, China. psjbpeng@scut.edu.cn.
² Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. psjbpeng@scut.edu.cn.
³ School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, China. magicwei@foxmail.com.
⁴ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. magicwei@foxmail.com.
⁵ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. zhu.zhennan@mail.scut.edu.cn.
⁶ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. ninghl@scut.edu.cn.
⁷ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. c.w01@mail.scut.edu.cn.
⁸ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. kk-lu@foxmail.com.
⁹ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. yaorihui@scut.edu.cn.
¹⁰ Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China. tao.h@scut.edu.cn.
¹¹ Key Laboratory of Advanced Display and System Applications of Ministry of Education, Shanghai University, Shanghai 200072, China. zhengyq21cn@126.com.
¹² Institute for Advanced Materials and Guangdong Provincial Key Laboratory of Quantum Engineering and Quantum Materials, South China Normal University, Guangzhou 510006, China. luxubing@scnu.edu.cn.

Abstract

In this paper, an alumina-zirconia (Al₂O₃-ZrO₂) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al₂O₃/ZrO₂ in nanolaminates: when the content of Al₂O₃ was higher than 50%, the properties of nanolaminates, such as the optical energy gap, dielectric strength (V_ds), capacitance density, and relative permittivity were relatively stable, while the change of these properties became larger when the content of Al₂O₃ was less than 50%. With the content of ZrO₂ varying from 50% to 100%, the variation of these properties was up to 0.482 eV, 2.12 MV/cm, 135.35 nF/cm², and 11.64, respectively. Furthermore, it was demonstrated that the dielectric strength of nanolaminates were influenced significantly by the number (n) of bilayers. Every increment of one Al₂O₃-ZrO₂ bilayer will enhance the dielectric strength by around 0.39 MV/cm (V_ds ≈ 0.86 + 0.39n). This could be contributed to the amorphous alumina which interrupted the grain boundaries of zirconia.

Keywords: Al2O3-ZrO2 nanolaminate dielectric; properties-adjustable; spin-coating.