Nanoindentation became a versatile tool for testing local mechanical properties beyond hardness and modulus. By adapting standard nanoindentation test methods, simple protocols capable of probing thermally activated deformation processes can be accomplished. Abrupt strain-rate changes within one indentation allow determining the strain-rate dependency of hardness at various indentation depths. For probing lower strain-rates and excluding thermal drift influences, long-term creep experiments can be performed by using the dynamic contact stiffness for determining the true contact area. From both procedures hardness and strain-rate, and consequently strain-rate sensitivity and activation volume can be reliably deducted within one indentation, permitting information on the locally acting thermally activated deformation mechanism. This review will first discuss various testing protocols including possible challenges and improvements. Second, it will focus on different examples showing the direct influence of crystal structure and/or microstructure on the underlying deformation behavior in pure and highly alloyed material systems.