Fabrication of Ordered SnO₂ Nanostructures with Enhanced Humidity Sensing Performance

Wei Li; Juyan Liu; Chao Ding; Gang Bai; Jie Xu; Qingying Ren; Jinze Li

doi:10.3390/s17102392

Fabrication of Ordered SnO₂ Nanostructures with Enhanced Humidity Sensing Performance

Sensors (Basel). 2017 Oct 20;17(10):2392. doi: 10.3390/s17102392.

Authors

Wei Li^{1

2}, Juyan Liu³, Chao Ding⁴, Gang Bai⁵, Jie Xu⁶, Qingying Ren⁷, Jinze Li⁸

Affiliations

¹ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Liw@njupt.edu.cn.
² State Key Laboratory of Millimeter Waves, Southeast University, Nanjing 210096, China. Liw@njupt.edu.cn.
³ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. 1215022733@njupt.edu.cn.
⁴ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. 1015020833@njupt.edu.cn.
⁵ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Baigang@njupt.edu.cn.
⁶ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. jiexu@njupt.edu.cn.
⁷ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Rqy@njupt.edu.cn.
⁸ College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. LiJinze@njupt.edu.cn.

Abstract

Ordered SnO₂ nanostructures were prepared as humidity sensors by nanosphere lithography with the magnetron sputtering technique. The X-ray diffraction patterns of SnO₂ nanostructures show that all intense diffraction peaks correspond to the crystallographic planes of SnO₂. The Atomic Force Microscope (AFM) mage shows that these SnO₂ nanostructures exhibited a classic honeycomb structure. The resistance of this sensor was measured to show that the resistance of the sensor decreases with an increase from lower relative humidity (RH) to higher RH. Additionally, the longest response/recovery time was 32 s/42 s for 11-96% RH. The hysteresis for the SnO₂ nanostructure sensor was <5%.

Keywords: SnO2 nanostructure; humidity sensor; nanosphere lithography.