Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced Rayleigh equation

Opt Lett. 2017 Jul 1;42(13):2631-2634. doi: 10.1364/OL.42.002631.

Abstract

A computationally efficient algorithm based on the reduced Rayleigh equation, combined with an optimization scheme, is used to accurately retrieve the morphological parameters of a two-dimensional plasmonic photonic crystal from angle-resolved spectroscopic Mueller matrix ellipsometric measurements. The numerical method is successfully tested against experimental data and gives morphological parameters consistent with SEM and AFM measurements.