Double-mode lateral-field-excitation bulk acoustic wave characteristics of Ca3TaGa3Si2O14 crystals

Tingfeng Ma; Qiong Zhang; Fapeng Yu; Chao Xie; Ji Wang; Jianke Du; Bin Huang; Jiahan Huang; Chao Zhang

doi:10.1121/1.4996001

Double-mode lateral-field-excitation bulk acoustic wave characteristics of Ca₃TaGa₃Si₂O₁₄ crystals

J Acoust Soc Am. 2017 Aug;142(2):641. doi: 10.1121/1.4996001.

Authors

Tingfeng Ma¹, Qiong Zhang¹, Fapeng Yu², Chao Xie¹, Ji Wang¹, Jianke Du¹, Bin Huang¹, Jiahan Huang¹, Chao Zhang³

Affiliations

¹ Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
² State Key Laboratory of Crystal Material, Shandong University, Jinan 250100, China.
³ Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China.

PMID: 28863593
DOI: 10.1121/1.4996001

Abstract

The double-mode lateral-field-excitation (LFE) bulk acoustic wave characteristics of Ca₃TaGa₃Si₂O₁₄ (CTGS) crystals are investigated. It is found that LFE devices based on (yxl)-57° CTGS crystals can work on both pure-LFE and pseudo-LFE modes when the driving electric field direction is normal to the crystallographic x axis of the piezoelectric substrate. Several double-mode LFE bulk acoustic wave devices based on CTGS crystals are designed and tested. The experimental results conform to the theoretical prediction well. Being able to operate in pure-LFE and pseudo-LFE modes, the double-mode LFE sensors show high sensitivity to both mechanical and electrical property changes of analytes. The results provide the crystal cut for double-mode LFE sensors, which is a critical basis of designing high-performance chemical and biological sensors by using double-mode LFE devices.

Publication types

Research Support, Non-U.S. Gov't