Ideally hexagonally ordered TiO2 nanotube layers were produced through the optimized anodization of Ti substrates. The Ti substrates were firstly covered with a TiN protecting layer prepared through atomic layer deposition (ALD). Pre-texturing of the TiN-protected Ti substrate on an area of 20×20 μm2 was carried out by focused ion beam (FIB) milling, yielding uniform nanoholes with a hexagonal arrangement throughout the TiN layer with three different interpore distances. The subsequent anodic nanotube growth using ethylene-glycol-based electrolyte followed the pre-textured nanoholes, resulting in perfectly ordered nanotube layers (resembling honeycomb porous anodic alumina) without any point defects and with a thickness of approximately 2 μm over the whole area of the pattern.
Keywords: TiN protecting layers; TiO2 nanotube layers; anodization; focused ion beam milling; hexagonal ordering.