Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Felix Biegger; Felix Jungwirth; Michael Stanislaus Seifner; Christoph Rameshan; Sven Barth

doi:10.1007/s00706-017-1980-2

Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

Monatsh Chem. 2017;148(8):1385-1392. doi: 10.1007/s00706-017-1980-2. Epub 2017 Jun 2.

Authors

Felix Biegger¹, Felix Jungwirth¹, Michael Stanislaus Seifner¹, Christoph Rameshan¹, Sven Barth¹

Affiliation

¹ Institute of Materials Chemistry, TU Wien, Getreidemarkt 9, Vienna, 1060 Austria.

Abstract

Abstract: Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In₂O_3-x S _x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [<62% (S/(S + O)) for the n-butyl derivatives]. In addition to thin films, polycrystalline 1D structures are obtained at slightly modified synthesis conditions. The materials are analysed by EDX, XRD, XPS, SEM, and TEM.

Keywords: AACVD; Indium aminoalcoholates; Nanowires; Oxysulphides; Thin films.