SAW Sensors for Chemical Vapors and Gases

Sensors (Basel). 2017 Apr 8;17(4):801. doi: 10.3390/s17040801.

Abstract

Surface acoustic wave (SAW) technology provides a sensitive platform for sensing chemicals in gaseous and fluidic states with the inherent advantages of passive and wireless operation. In this review, we provide a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase. In particular, we review the progress in general understanding of the SAW chemical sensing mechanism, optimization of the sensor characteristics, and the development of the sensors operational at different conditions. Based on previous publications, we suggest some appropriate sensing approaches for particular applications and identify new opportunities and needs for additional research in this area moving into the future.

Keywords: acoustic waves; acoustoelectric effect; interdigital transducer; mass loading; piezoelectric effect; radiofrequency; sensing layer; viscoelasticity.

Publication types

  • Review