Compact focusing grating couplers for silicon horizontal slot waveguides

Opt Lett. 2017 Feb 1;42(3):490-493. doi: 10.1364/OL.42.000490.

Abstract

In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer sandwiched between amorphous silicon and a silicon-on-insulator. The measured coupling losses are about 4 dB with a 3 dB bandwidth of 38 nm. The fully etched configuration allows the fabrication in a single lithography step.