We demonstrated a high-performance Si-organic hybrid heterojunction solar cell utilizing low-temperature and liquid-phase-processed TiO2 as an interlayer between poly(3,4-ethylene dioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) and Si nanoholes to produce a conformal contact on the surface of the Si nanostructure. The hydrophilic TiO2/Si-nanohole surface enabled the PEDOT:PSS to flow into the spacing of the close-packed nanoholes. Scanning electron microscopy images were used to confirm the PEDOT:PSS nanohole filling induced by the TiO2. With forming gas annealing of the double-sided TiO2, high Voc (0.63 V) and Jsc (35.7 mA/cm2) values were obtained, yielding a high power conversion efficiency of 14.7%. The high Voc was attributed to the surface passivation of Si by annealed TiO2. The X-ray photoelectron spectroscopy investigation at the TiO2/Si interface indicates the TiOx signal decreased and the TiO2 and SiOx signals increased after annealing. The Si-O bonding found in the O 1s study appeared in the form of Si-O-Si bonding to serve surface passivation. The band alignment of the PEDOT:PSS/TiO2/n-Si hetero-interfaces was postulated and plotted. The Vbi in the system after annealing was assumed to be higher because of the reduction of bulk and surface states that yield high Voc. After annealing, the Vbi increased from 0.805 to 0.905 V. The reduction of surface recombination velocity proved the passivation ability of TiO2 after annealing. With proven surface passivation and conformal PEDOT:PSS/Si nanohole interfaces for enhanced contact, this Si-organic hybrid heterojunction solar cell with solution-processed TiO2 interlayers has excellent potential for application as a high-efficiency and low-cost Si solar cell.
Keywords: conformal interfacial layer; hybrid organic/inorganic heterojunction; solar cell; solution-processed TiO2; surface inversion; trap assisted tunneling.