We report the photochromic properties of amorphous MoO3 films deposited by dc sputtering with different O2 flow rates. The kinetics of film coloration under UV light irradiation is determined using optical transmission spectroscopy. Changes in the absorbance and refractive index were derived from the analysis of transmittance spectra. The absorbance spectra exhibited a growing broad peak centered around 830 nm, which was induced by the UV irradiation. In the early stages of irradiation, the absorbance of the films did not change but their refractive indices did change. This induction time was correlated with the O2 partial pressure during the film deposition, which was controlled by the O2 flow rate. The origins of this observation are discussed.
Keywords: absorption coefficient; molybdenum oxide; oxygen vacancy; photochromism; refractive index; thin film.