A new technique is proposed for the fabrication of fine patterns of molecular doping in organic-inorganic hybrid materials by the combination of capillary electrophoresis doping (CED) and photolithography. The UV-induced polymerization of [Formula: see text] bonds in organic groups yields a fine contrast of structures with the desired pattern in organic-inorganic hybrid films, and CED treatment introduces functional molecules only into unirradiated regions to form the doping patterns of molecules inside the films. The fine patterning of rhodamine-6G doping with from 2 to 4 μm resolution is demonstrated in hybrid films of 10 μm thickness.
Keywords: capillary electrophoresis doping (CED); molecular-doping lithography; organic-inorganic hybrid films; photolithograp; rhodamine-6G.