This research proposes a substrate-integrated waveguide (SIW) cavity sensor to detect several chemicals using the millimeter-wave frequency range. The frequency response of the presented SIW sensor is switched by filling a very small quantity of chemical inside of the fluidic channel, which also causes a difference in the effective permittivity. The fluidic channel on this structure is either empty or filled with a chemical; when it is empty the structure resonates at 17.08 GHz. There is always a different resonant frequency when any chemical is injected into the fluidic channel. The maximum amount of chemical after injection is held in the center of the SIW structure, which has the maximum magnitude of the electric field distribution. Thus, the objective of sensing chemicals in this research is achieved by perturbing the electric fields of the SIW structure.
Keywords: SIW; chemical sensor; ethanol; fluidics; multilayer cavity.