Antimony-doped tin oxide (ATO) films were deposited on polyethersulfone (PES) substrates by means of a radio frequency (RF) magnetron sputtering method, using a SnO2 target mixed with 6 wt% Sb at room temperature and using various RF powers; these films were used as transparent electrodes in inverted organic solar cells (IOSC). We investigated the structural, optical, and electrical properties of the resulting films by means of various analyses, including X-ray diffraction (XRD), UV-visible spectroscopy, and Hall effect measurements. The crystallinity and conductivity of the ATO films were increased by increasing the RF power used. Based on the experimental data acquired, we fabricated IOSCs based on ATO electrodes deposited by using various conditions. Each IOSC device was composed of an ATO electrode, a ZnO buffer layer, a photoactive layer (P3HT:PCBM), and an Al cathode. The IOSC based on an ATO electrode fabricated at the RF power of 160 W exhibited good device performance due to the electrode's high conductivity and crystallinity.