Characterization of the geometry of microscale periodic structures using acoustic microscopy

Abstract

Periodic structures are very common in both scientific investigations and engineering applications. The geometry of the periodic structure is important for its designed functionality. Although the techniques such as optical and electron microscopy are capable of measuring the periodicity of microscale periodically-corrugated structures, they cannot be used to measure the height or depth of the corrugation. The technique of acoustic microscopy has been developed rapidly and it has been applied in the studies of steel integrated structures, ferro-elastic ceramics, human retina, semiconductors, composites, etc. In acoustic microscopy, V(z) curves have been used to investigate the visco-elastic parameters of thin sliced samples of composites, animal tissue, etc., while in this work it is applied in characterizing the geometry of periodically corrugated structures. The measurements of the geometry of periodic structures obtained using acoustic microscopy are compared with those obtained using optical microscopy, and the reliability of this acoustic technique is also examined.

Keywords: Acoustic microscopy; Corrugation; Nondestructive testing; Periodic structures; Ultrasonics; V(z) curves.