An array of black-phosphorus photodetectors with channel lengths down to 100 nm is fabricated, and temperature-dependent photodetection measurements from 300 K down to 20 K are carried out. The devices show high photoresponse in a broadband spectral range with a record-high photoresponsivity of 4.3 × 10(6) A W(-1) at 300 K for the 100 nm device.
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