Thin plasma polymer films were deposited in hexamethyldisiloxane (HMDSO) and HMDSO/O2 low-pressure discharges and their chemical structures analyzed using infrared (IR) spectroscopy and neutron reflectometry (NR). The (plasma-polymerized) ppHMDSO film exhibits hydrophobic, poly(dimethylsiloxane)-like properties, while the retention of carbon groups is reduced by O2 addition, yielding a more inorganic, hydrophilic ppSiOx film. Both films show a minor (vertical) density gradient perpendicular to the substrate, where the exposed film surface seems to be more oxidized, indicating oxidative aging reactions upon contact with air. The hydration and water uptake abilities of the films in aqueous environments were investigated in humid environments using ellipsometry, NR in D2O, and multiple transmission-reflection IR measurements after equilibration of the films in water.